| 摘要 |
PURPOSE:To precisely process a margin part by a method wherein a specified laser beam is used and it is applied in a square spot shape. CONSTITUTION:The irradiation amount of a laser beam whose wave-length is at 1.5mum or lower is limited to a range of 2 to 10mJ/mm<2>. A metal deposited film is removed by using an intermittent pulse within a range of 0.5 to 10kHz. The laser beam is guided up to an irradiation part from a light source by using an optical fiber; after that, it is condensed by using a lens through a square prismatic glass. Thereby, a square beam spot whose intensity distribution is uniform is formed, and stripe-shaped margin parts (insulating parts) 14, 15 can be formed in a direction parallel to and oblique to or perpendicular to the flow direction of a deposited film. |
