Methods for making microlens arrays.

摘要

In the prodn. of a lens array a pattern of discrete multiple elements of a first material is formed on a substrate. The elements are partially melted to produce rounded upper surfaces and then solidified; the assembly is then subjected to reactive ion etching so that differential etching produces lens elements in the substrate. During etching the compsn. of the gas in the chamber is changed to adjust the curvature of the elements and to reduce aberration in them. Pref. two gases are supplied and their ratio is changed; the gases may be CHF3 and oxygen. The substrate may be of silica and the first material, a photoresist.