| 摘要 |
<p>A high output semiconductor device (101) mounting a plurality of FET elements (101a) on a semi-insulating semiconductor substrate (1), comprises a prescribed conductivity type semiconductor layer (2) formed on the semi-insulating semiconductor substrate (1), a plurality of source and drain electrodes (10a, 10b) alternatingly arranged on the semiconductor layer (2), a plurality of gate electrodes (10) respectively disposed in gate recesses (110), each recess is formed by etching each surface region of the semiconductor layer (2) between each adjacent source and drain electrodes (10a, 10b). The gate recess (110) has the asymmetrical two-stage recess structure having a second bottom surface (112a) only at the source side part of the side wall of the recess (110), wherein the second bottom surface (112a) is positioned at a depth between a first bottom surface (111a) in contact with the gate electrode (10) and the upper surface of the semiconductor layer (2) and is not in contact with the gate electrode (10). Therefore, the thickness (Da2) of the active layer at the source side part is larger that that (Da1) in the one-stage recess structure, with a result that the source resistance is reduced because of an increase in the thickness (Da2) of the active layer at the source side region while avoiding deterioration of the gate drain breakdown voltage due to an increase in the thickness of the active layer at the drain side region. <IMAGE></p> |
