发明名称 |
METHOD OF MANUFACTURING INK JET HEAD |
摘要 |
A method of manufacturing an ink jet head comprising the steps of: laminating a dry film photoresist (51) on an inner surface of a nozzle plate (2), the dry film photoresist being a photohardening resin; exposing the photoresist (51) with such energy as to half-harden the photoresist while superposing thereon a photomask (M1) having a predetermined masking pattern; developing the thus exposed photoresist (51); laminating a photoresist (52); secondarily exposing the photoresists (51), (52) to form a partially hardened portion (51C); bonding an elastic plate on the portion (51C); and integrating the bonded plates while hardening them by heating. <IMAGE> <IMAGE> |
申请公布号 |
EP0554912(A3) |
申请公布日期 |
1994.09.07 |
申请号 |
EP19930101938 |
申请日期 |
1993.02.08 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
USUI, MINORU;KATAKURA, TAKAHIRO;SONEHARA, HIDEAKI;NAKA, TAKAHIRO;NAKAMURA, OSAMU |
分类号 |
B41J2/045;B41J2/055;B41J2/16;(IPC1-7):B41J2/16 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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