| 摘要 |
A coating film separating device includes a substrate holding device for holding a substrate, at least one side of which is covered with a coating film, a roller unit equipped with a roller and a device for pressing the roller against an end portion of the surface of the coating film, a roller unit driving device for moving the roller unit on the end portion of the surface of the coating film in the widthwise direction of the substrate, a guide device for enabling the roller unit to move along an end portion of the substrate, and a device for spraying pressurized fluid at the interface between the substrate and the coating film at the edge portion of the substrate along which the roller unit moves.
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