| 摘要 |
PURPOSE:To continuously execute uniform polishing by providing a plurality of polishing tools having a polishing pad, by realizing the eccentric rotation of these polishing tools by inverting the adjacent polishing tools, and at the same time, swaying the polishing tools in the direction orthogonal to the transferring direction of the plate-shaped body. CONSTITUTION:A plurality of canti-levers 1 where polishing tools 2 are supported thereby respectively are provided on a lift-up frame 21, and rotary shafts 37A, 37B provided on the respective polishing tools 2 are interlockingly rotated by the rotation of a driving pulley 47 by a motor through a common shaft 9, timing belts 46, 39 or the like. A plate shaped body 4 is supported by a polishing table 6 which travels on the rail 5 through a cushion material, and this polishing table 6 can be transferred through the engagement of the pinion and the rack which are rotated by the motor. The respective polishing tools 2 having a polishing pad are rotated in an eccentric manner by inverting the rotational phase of the adjacent polishing tools by 180 degrees, and the polishing is realized by swaying the polishing tools in the direction orthogonal to the transferring direction of the plate-shaped body 4. |
