| 摘要 |
Provided is a novel semiconductor accelerometer possessing an acceleration sensing feature including gage resistors on beams and a detecting feature for abnormality of the acceleration sensing feature in which the novel structure is manifested. The detection of abnormality of the acceleration sensing feature is accomplished by comparing a voltage applied to a bridge circuit comprising the gage resistors with a predetermined reference voltage. The detecting feature essentially comprises a comparator and a generator. The comparator compares the voltage applied to the bridge circuit with a predetermined reference voltage supplied from the voltage generator. When the gage resistors has abnormality in the sensing performance, the applied voltage takes a higher voltage than that in the normal state. Therefore, the comparison of the above both voltages permits recognizing the gage resistors to have abnormality. The result of the comparison may be transmitted either through the amplifier to a common terminal to the acceleration signals or through an executive output circuit to an executive output terminal.
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