发明名称 |
Semiconductor wafer heater with infrared lamp module with light blocking means |
摘要 |
A thin reflective cylindrical baffle [20] in a radiant lamp heater is provided in the space below a plurality of heating bulbs [2,4,6] (arranged in a center position and around a middle and outer ring) and above a quartz window [12]. The baffle diameter is such that it fits within the annular space between the middle [4] and outer [6]ring of bulbs. The baffle which blocks a predetermined amount of light generated by the lamp bulbs [20] allows improved controllability of wafer temperature profile-for a wafer heated by a radiant lamp heater.
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申请公布号 |
US5345534(A) |
申请公布日期 |
1994.09.06 |
申请号 |
US19930039720 |
申请日期 |
1993.03.29 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
NAJM, HABIB N.;HUANG, STEVE S.;DAVIS, CECIL J.;MATTHEWS, ROBERT T. |
分类号 |
H01L21/26;H01L21/00;H01L21/324;(IPC1-7):H01L21/20 |
主分类号 |
H01L21/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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