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发明名称
CMOS TRANSISTOR, GATE ELECTRODE AND CONNECTION HOLE THEREOF, AND MANUFACTURE THEREOF
摘要
申请公布号
JPH06244369(A)
申请公布日期
1994.09.02
申请号
JP19930055138
申请日期
1993.02.19
申请人
SONY CORP
发明人
ISHIDA MINORU
分类号
H01L21/28;H01L21/8238;H01L27/092;(IPC1-7):H01L27/092
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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