摘要 |
PURPOSE:To automatically and quantitatively determine the positions of sockets of a burn-in board without containing artificial errors and judge the quality. CONSTITUTION:A burn-in board inspecting device is provided with an XY table 1 mounted with a burn-in board 3 arranged with multiple sockets 4 on a line and a laser displacement gauge 2 radiating a laser beam to the burn-in board 3 having a light receiving face receiving the reflected beams of a laser beam radiated to the burn-in board 3 at a prescribed inclination. The burn-in board 3 is relatively and two-dimensionally moved against the laser displacement gauge 2, the laser beam is scanned on the burn-in board 3, only the reflected beam from a socket 4 is received, intervals between a group of pulse outputs obtained from the reflected beam are counted to determine the shift quantity, positions of the sockets 4 are recognized, and they are compared with the reference values to judge the quality. |