| 摘要 |
PURPOSE:To supply laser gas having stable composition ratio without changing mixture ratio with the lapse of time, in a laser gas mixer for supplying a laser oscillator with laser gas. CONSTITUTION:Containers 30a, 30b, and 30c by volume are formed so that they may have the same volume ratio as the target volume ratio a:b:c of laser gas to be generated, and the gas pressure inside the containers 30a, etc., by volume is detected with one pressure sensor 31 provided in common, and until the gas pressure reaches the same specified gas pressure 2T, they are charged with simple composition gas such as carbon diode gas or the like, and each simple composition gas is let flow for mixing into the laser gas mixing containers 40a and 40b. Therefore, laser gas at specified composition ratio is generated in the laser gas mixing parts 40a and 40b. Accordingly, laser gas stable in composition ratio can be supplied to a laser oscillator without changing the mixture ratio of laser gas changing with the lapse of time. |
