| 摘要 |
PURPOSE:To enhance efficiency in the analysis by sticking a filmy sample with a pointed sample holder and holding the sample in place thereby bringing about a high vacuum allowing analysis through short time evacuation. CONSTITUTION:A filmy sample 2 is stuck with a pointed sample holder 18 and held in place and then the surface of the sample 2 is irradiated with X-ray 4 and analyzed. In this regard, the holder 18 is not necessarily required to be made of a conductive material but can be made of such metal as stainless steel which is then grounded. Since the sample 2 is stuck with the holder 18 and held in place, no adhesive is required for holding the sample 2 and thereby no problem of out gas arise from the adhesive. |
