发明名称 LIGHT CONFINING STRUCTURE AND PHOTODETECTOR USING STRUCTURE THEREOF
摘要 PURPOSE:To provide a light confining structure, which can decrease surface reflection and can perform the light confinement effectively. CONSTITUTION:A transition layer 2 having the recess parts and protruding parts is provided on the surface of the a substrate 3. The repeating width of the recess part and the protruding part is made to be the wavelength or less of main light 5, which is to be confined. It is preferable to provide recess parts and protruding parts 8 and 9 at the rear surface of the substrate 3. The refractive index of the transition layer 2 is changed so as to approach the refractive index of the substrate toward the side of the substrate from the reverse side of the substrate.
申请公布号 JPH06244444(A) 申请公布日期 1994.09.02
申请号 JP19930029092 申请日期 1993.02.18
申请人 HITACHI LTD 发明人 UEMATSU TSUYOSHI;KETSUSAKO MITSUNORI;OTSUKA HIROYUKI;NAGATA YASUSHI
分类号 G02B5/00;H01L31/04;H01L31/10 主分类号 G02B5/00
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