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发明名称
METHOD FOR MODIFYING IC
摘要
申请公布号
JPH06244177(A)
申请公布日期
1994.09.02
申请号
JP19930284663
申请日期
1993.11.15
申请人
HITACHI LTD
发明人
YAMAGUCHI HIROSHI;SHIMASE AKIRA;MIYAUCHI TAKEOKI;HONGO MIKIO
分类号
H01L21/302;H01L21/31;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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