CANTILEVER FOR ATOMIC FORCE MICROSCOPE, MANUFACTURE THEREOF, ATOMIC FORCE MICROSCOPE AND SAMPLE SURFACE ADHESION EVACUATION USING THIS CANTILEVER

摘要

PURPOSE:To quantitatively evaluate the adhesion between two material surfaces. CONSTITUTION:The surface of the probe 12 of the cantilever of an interatomic force microscope is formed with a desired film, e.g. a resist film 11b, the interatomic force acting between the probe 12 and a sample is measured, and the adhesion between the film 11b formed on the surface of the probe 12 and the sample surface is evaluated based on the interatomic force.