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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH06244137(A)
申请公布日期
1994.09.02
申请号
JP19930027062
申请日期
1993.02.17
申请人
NEC CORP
发明人
NISHIO NAOHARU
分类号
H01L21/28;H01L21/336;H01L29/78;(IPC1-7):H01L21/28;H01L29/784
主分类号
H01L21/28
代理机构
代理人
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地址
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