发明名称 |
RADIATION-SENSITIVE MIXTURE AND THE PRODUCTION OF RELIEF STRUCTURES HAVING IMPROVED CONTRAST |
摘要 |
Positive-working radiationsensitive mixtures, essentially consisting of (a1) a water-insoluble organic binder which contains acid-labile groups and is rendered soluble in aqueous alkaline solutions by the action of an acid, or (a2.1) a polymeric binder which is insoluble in water but soluble in aqueous alkaline solutions and (a2.2) an organic compound whose solubility in an aqueous alkaline developer is increased by the action of an acid, and (b) an organic compound which produces an acid under the action of actinic radiation, which additionally contain (c) a strongly basic organic compound having hydroxide, alkoxide or phenoxide anions, are suitable for the production of relief structures having improved contrast.
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申请公布号 |
CA2116624(A1) |
申请公布日期 |
1994.09.02 |
申请号 |
CA19942116624 |
申请日期 |
1994.02.28 |
申请人 |
FUNHOFF, DIRK;SCHWALM, REINHOLD;BINDER, HORST |
发明人 |
FUNHOFF, DIRK;SCHWALM, REINHOLD;BINDER, HORST |
分类号 |
C08K5/375;C08K5/42;C09D125/02;C09D125/18;C09D143/04;G03F7/004;G03F7/029;G03F7/032;G03F7/039;H01L21/027;(IPC1-7):G03F7/039 |
主分类号 |
C08K5/375 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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