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发明名称
Verfahren und Vorrichtung zur Reinigung einer Ionenimplantationskammer
摘要
申请公布号
DE3641578(C2)
申请公布日期
1994.09.01
申请号
DE19863641578
申请日期
1986.12.05
申请人
EATON CORP., CLEVELAND, OHIO, US
发明人
GUERRA, MICHAEL, NEWBURYPORT, MASS., US
分类号
H01L21/265;H01J37/18;H01J37/30;H01J37/317;(IPC1-7):C23C14/48
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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