发明名称 Monocrystal rod conveying apparatus.
摘要 <p>The present invention relates to a device 32 for taking out a grown monocrystal rod 22 from monocrystal pulling up devices 10 to 14 and conveying them to a predetermined position. An object is to simplify the overall structure, which includes a plurality of monocrystal pulling up devices 10 to 14, and reducing the overall cost. A rail 31 is disposed along the monocrystal pulling up devices 10 to 14 and travelling portions 33 and 34 travel along the rail 31. The upper end portion of an upper cylinder 36 is fixed to the travelling portions 33 and 34, the upper portion of an elevational shaft 37 is inserted into the upper cylinder 36, the lower portion of the elevational shaft 37 is inserted into a lower cylinder 39 and a plate 44 is able to approach and move away from the lower cylinder 39. A plate 45 is able to rotate around a shaft 46 with respect to the position of the plate 44. Furthermore, the plate 45 has a receiving finger 53A and a holding finger 54A. <IMAGE></p>
申请公布号 EP0460477(B1) 申请公布日期 1994.08.31
申请号 EP19910108514 申请日期 1991.05.25
申请人 SHIN-ETSU HANDOTAI COMPANY, LIMITED 发明人 IBE, HIROYUKI
分类号 C30B15/00;C30B15/30;C30B35/00;(IPC1-7):C30B15/30 主分类号 C30B15/00
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