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发明名称
摘要
申请公布号
JPH0669085(B2)
申请公布日期
1994.08.31
申请号
JP19860210274
申请日期
1986.09.05
申请人
发明人
分类号
H01L21/31;H01L21/02;H01L21/84;H01L27/12;(IPC1-7):H01L27/12
主分类号
H01L21/31
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