Plasma processing apparatus and operation method thereof,申请号GB19910005063-传众专利搜索

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发明名称	Plasma processing apparatus and operation method thereof
摘要
申请公布号	GB2243944(B)	申请公布日期	1994.08.31
申请号	GB19910005063	申请日期	1991.03.11
申请人	* FUJI ELECTRIC CO LTD	发明人	KIYOSHI * OHIWA
分类号	H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32	主分类号	H05H1/46
代理机构		代理人
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