发明名称 |
Waferbasket for silicon wafers. |
摘要 |
<p>A small boat intended to receive semiconductor wafers in vertical position. This boat comprises a cradle (20) in the form of a hollow half-cylinder with a horizontal axis; two grooved plates (21a, 21b) arranged against the side walls of the cradle (20) for receiving the wafers of semiconductor to be processed, these two plates being independent from one another and bearing on the cradle without being attached thereto; and a horizontal plate (23) allowing the two grooved plates to be supported and acting as a removable guide during the loading of the semiconductor wafers. <IMAGE></p> |
申请公布号 |
EP0612869(A1) |
申请公布日期 |
1994.08.31 |
申请号 |
EP19940410009 |
申请日期 |
1994.02.23 |
申请人 |
SGS-THOMSON MICROELECTRONICS S.A. |
发明人 |
LETORT, XAVIER |
分类号 |
H01L21/22;C30B31/14;H01L21/673;(IPC1-7):C30B31/14 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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