| 摘要 |
PURPOSE:To prevent the generation of faults on the surface of a substrate due to the abrasion chip by forming a recess on the edge surface of a carrier and attaching a soft cloth on the part ranging from the recessed part to the carrier side surface part, in the polishing for a workpiece which is inserted through a cloth into a carrier. CONSTITUTION:As for the single-sided surface polishing in which a carrier having a hole for accommodating a workpiece is installed on a pressure plate, and polishing work is carried out, supplying the polishing liquid in which the polishing material such as cerium cxide is suspended in water. A recess is formed on the carrier, in a certain depth, e.g. 0.5-1.5mm along the carrier surface from the carrier edge surface part where the carrier and the workpiece contact. A soft cloth is attached on the part ranging from the recessed part to the carrier side surface part. The recess has a width (5mm or more) from the carrier side surface in contact with a base plate to the outer periphery, and the depth is set larger than the thicknes of the soft cloth. As the soft cloth, is used the foamed polyurethane nonwoven fabric. |
