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发明名称
CHEMICAL VAPOR GROWTH APPARATUS
摘要
申请公布号
KR940007866(B1)
申请公布日期
1994.08.26
申请号
KR19900017349
申请日期
1990.10.29
申请人
TOSHIBA CO., LTD.
发明人
MIYAZAKI, SHINJI
分类号
C23C16/44;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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