Plasmareaktori kerrostusmenetelmää tai gravyyria varten,申请号FI19940003894-传众专利搜索

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发明名称	Plasmareaktori kerrostusmenetelmää tai gravyyria varten
摘要
申请公布号	FI943894(A0)	申请公布日期	1994.08.24
申请号	FI19940003894	申请日期	1994.08.24
申请人	ALCATEL CIT	发明人	PEARSON, DAVID
分类号	C23F4/00;H01J37/32;H01L21/205;H01L21/302;H05H1/46;(IPC1-7):H05H	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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