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经营范围
发明名称
Process for chemical vapor deposition.
摘要
申请公布号
EP0311401(B1)
申请公布日期
1994.08.24
申请号
EP19880309324
申请日期
1988.10.06
申请人
FUJITSU LIMITED
发明人
KIMURA, TAKAFUMI;YAMAWAKI, HIDEKI;IKEDA, KAZUTO;IHARA, MASARU
分类号
C01G1/00;C01G3/00;C04B41/87;C23C16/40;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):H01L39/24
主分类号
C01G1/00
代理机构
代理人
主权项
地址
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