| 摘要 |
PURPOSE:To prevent interference among different transportation systems and to provide a stocker capable of satisfying needs of every user, by providing a stocker body with a plurality of supplying and discharging ports, and providing a cylindrical stock shelf rotatably in a rectangular frame. CONSTITUTION:A stocker body 1 is constructed by mounting a cylindrical stocking shelf 4 rotatably in a rectangular frame 3. The body is constructed in a unit fashion such that a handler mechanism 5 for introducing and discharging wafers can be attached to any desired face of the body 1. The stocking shelf 4 is constituted by a multiplicity of disk-type plates 4a having an aperture 6 at the center thereof and arranged one over another so that they are shaped into a cylinder as a whole. An introducing and discharging port 2a is utilized for transportation between processes, a port 2b is utilized for introduction or discharge by an operator and a port 2c is utilized for transportation within a process. In this manner, interference among different transportation systems can be prevented. Thus, it is possible to provide a stocker adapted to satisfy needs of each user. |
