发明名称 |
Structure and fabrication of SiCr microfuses |
摘要 |
A SiCr microfuse, deletable either by electrical voltage pulses or by laser pulses, for rerouting the various components in an integrated circuit, as where redundancy in array structures is implemented, and the method of fabricating same, at any wiring level of the chip, by utilizing a direct resist masking of the SiCr fuse layer to eliminate problems of mask damage and residual metal adjacent the fuse.
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申请公布号 |
US5340775(A) |
申请公布日期 |
1994.08.23 |
申请号 |
US19930149250 |
申请日期 |
1993.11.09 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CARRUTHERS, ROY A.;DORLEANS, FERNAND J.;FITZSIMMONS, JOHN A.;FLITSCH, RICHARD;JUBINSKY, JAMES A.;LARSEN, GERALD R.;SCHWARTZ, GERALDINE C.;TSANG, PAUL J.;ZIELINSKI, ROBERT W. |
分类号 |
H01L23/525;H01L27/118;(IPC1-7):H01L21/465 |
主分类号 |
H01L23/525 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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