| 摘要 |
PURPOSE:To provide a processor which enables carriage without having thermal effect on a processed substance. CONSTITUTION:In a processor, which carries semiconductor wafers W into a plurality of processing chambers 15, 16, 17, and 18 in order and performs a chain of processing, first and second processors 12 and 13 are placed in the same processing chamber 18. The carrying of wafer W into and out of this processing chamber 18 is performed with a main arm 9 being a carry means common to all chambers, and the carry of the semiconductor wafer between both processing chambers 12 and 13 is performed with an exclusive carry means 19 provided inside the processing chamber 18. Hereby, the carry is made possible without having thermal effect on the semiconductor wafer W.
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