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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH06236928(A)
申请公布日期
1994.08.23
申请号
JP19930127443
申请日期
1993.05.28
申请人
KAWASAKI STEEL CORP
发明人
ISHIHARA KANJI
分类号
H01L23/52;H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/90;H01L21/320
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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