| 摘要 |
PURPOSE:To reduce the transfer time of the machining position data to a stage control part from a memory, to reduce the useless movement of a stage and to improve a throughput. CONSTITUTION:When the machining position data are transferred to the stage control part 12 from the memory 13, a data sorting means of the memory 13 sorts the plural machining position data to be transferred as an unit data block ahead on the transfer so that the movement of an XY stage 2 is minimized in the unit data block. A data block transfer means of the memory 13 transfers the sorted machining position data to the stage control part 12 in a data block unit. |
