PRODUCTION OF QUARTZ GLASS

摘要

PURPOSE:To provide a producing method of a quartz glass excellent in light transmissivity and high in the homogeneity of refractive index. CONSTITUTION:In the producing for quartz glass by jetting an Si compound gas, gaseous oxygen and gaseous hydrogen from a burner 1 to burn and depositing a quartz glass on a target 3 to form an ingot 7, the temp. distribution of the ingot is controlled to be suitable for the homogeneity of refractive index by changing the gas flow rate of the burner by a mass flow controller 8 in accordance with the information obtained by measuring the temp. distribution of the head part of the ingot 7.