| 摘要 |
PURPOSE:To provide an acceleration sensor having simple structure where complicated operating process is eliminated without increasing any cost and to provide an extremely downsized angular speed sensor. CONSTITUTION:A cantilever upper electrode 3 is disposed on an insulator 15 provided on a substrate 1 having a lower electrode 2 and a power supply E is connected between the electrodes 2 and 3. Under a state where a constant voltage for generating field radiation continuously is applied from the power supply E, the upper electrode 3 is flexed upon application of force and a current corresponding to the flexure is detected thus determining acceleration immediately. |
