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发明名称
SPUTTERING CATHODE
摘要
申请公布号
JPH06235062(A)
申请公布日期
1994.08.23
申请号
JP19930174246
申请日期
1993.07.14
申请人
EMIERU BANDERUSUTORAETEN BV METSUTO BEPERUKUTE AANSUPURAKERIYUKUHEIDO
发明人
YOHAN BANDERUSHIYUTORAETEN
分类号
C23C14/34;H01B1/00;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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