发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE: To provide a method of manufacturing with simplified processes, a semiconductor device which can assure to restrain low facility investment and manufacturing cost. CONSTITUTION: This manufacturing method includes a process for eliminating a surface protection film 5 after forming an electrode pad 3 and a surface protection film 5 on the semiconductor substrate to form an aperture 7 by exposing the electrode pad 3, a process for forming a barrier metallic layer 9 at the upper part of the exposed electrode pad 3, a process for arranging solder balls 15 at the upper part of the barrier metallic layer 9 of the semiconductor substrate, using a first metallic mask 13 on a magnet 11 to form a solder bump electrode 17 on the electrode pad 3, a process for forming a wiring pattern between elements by coating a conductive paste between bump electrodes 17, using a second metallic mask 19 on the semiconductor substrate where the solder bump electrode 17 is formed on the magnet 11 and the process for forming a protection layer which is sealed by the molding resin.
申请公布号 JPH06236887(A) 申请公布日期 1994.08.23
申请号 JP19930264709 申请日期 1993.10.22
申请人 SAMSUNG ELECTRON CO LTD 发明人 KIN KUSEI
分类号 H01L21/3205;H01L21/321;H01L21/60;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/3205
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