发明名称 Semiconductor device and manufacturing method thereof
摘要 A gate electrode of a P-channel MOS transistor and a gate electrode of an N-channel MOS transistor which constitute a logic section, a gate electrode of an N-channel MOS transistor and a capacitor electrode which constitute a memory cell section are formed by patterning a first layer of polysilicon, so that the semiconductor device can be manufactured in a considerably simplified process as an SRAM, while taking advantage of the large capacity of a DRAM thereby to improve the yield.
申请公布号 US5341324(A) 申请公布日期 1994.08.23
申请号 US19920953699 申请日期 1992.09.30
申请人 SUMITOMO METAL INDUSTRIES, LTD. 发明人 MATSUMOTO, TOSHIYUKI;INADA, HIROFUMI;NITTAYA, HIROSHI;KATO, MASAHIRO
分类号 G02F1/1345;G02F1/136;G02F1/1368;H01L21/822;H01L21/8234;H01L21/8244;H01L27/04;H01L27/06;H01L27/10;H01L27/11;(IPC1-7):G11C11/24 主分类号 G02F1/1345
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