发明名称 |
Vacuum processing equipment |
摘要 |
A vacuum processing equipment is disclosed, which comprises a vacuum chamber and main and fore vacuum pumping mechanism for pumping down the vacuum chamber. The fore vacuum pumping mechanism includes a cooling means and a residual gas trapping means coupled to the cooling means. The cooling means is provided outside the vacuum chamber. The residual gas trapping means is provided in a zone of the vacuum chamber free from interference with the vacuum processing.
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申请公布号 |
US5340460(A) |
申请公布日期 |
1994.08.23 |
申请号 |
US19910746920 |
申请日期 |
1991.08.19 |
申请人 |
ANELVA CORPORATION |
发明人 |
KOBAYASHI, MASAHIKO;TAKEMURA, HIROBUMI;ISHIDA, TETSUO;TAKAHASHI, NOBUYUKI |
分类号 |
C23C14/54;C23C14/00;C23C14/56;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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