发明名称 |
Photoresist compositions with copolymer binder having phenolic and nonaromatic cyclic alcohol units where the distribution of the cyclic alcohol concentration is less than 8 mole percent |
摘要 |
The present invention relates to photoresists particularly suitable for deep U.V. exposure and having the capability of forming highly resolved features. The invention is characterized by use of a resist resin binder that comprises a nonaromatic cyclic alcohol-phenol copolymer that has a relatively low molecular weight and narrow distribution of molecular weight and cyclic alcohol concentration.
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申请公布号 |
US5340696(A) |
申请公布日期 |
1994.08.23 |
申请号 |
US19930010815 |
申请日期 |
1993.01.29 |
申请人 |
SHIPLEY COMPANY INC. |
发明人 |
THACKERAY, JAMES W.;DENISON, MARK;ORSULA, GEORGE W. |
分类号 |
G03F7/023;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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