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发明名称
ELEMENT FOR EVALUATION OF RESISTANCE
摘要
申请公布号
JPH06236912(A)
申请公布日期
1994.08.23
申请号
JP19930047505
申请日期
1993.02.10
申请人
NIPPON STEEL CORP
发明人
SATO YASUO
分类号
G01R27/02;G01R27/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R27/02
代理机构
代理人
主权项
地址
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