| 摘要 |
<p>PURPOSE:To provide an electrostatic chuck wherein its dielectric breakdown strength and its stability are excellent without lowering its attraction property and its response property and its degradation is suppressed. CONSTITUTION:The surface of an aluminum conductor 1 as a disk-shaped electrode is covered with a ceramic flame-sprayed film 2 as an insulator, and the side face, the bottom face and the corner part are covered with a ceramic flame-sprayed film 3. The ceramic flame-sprayed film 2 to be used as the attraction part of a sample is formed in such a way that an Al2O3 ceramic powder containing 25wt.% or lower of TiO2 is adjusted to obtain a volume resistivity of 10<9> to 10<11>OMEGA.cm and that the powder is flame-sprayed onto the surface of the conductor 1. In addition, the ceramic flame-sprayed film 3 for all other parts is formed in such a way that an Al2O3 ceramic powder which has been adjusted to obtain a volume resistivity of 10<12> to 10<14>OMEGA.cm is flame-sprayed onto the side face, the bottom face and the corner part of the conductor 1. The sample 9 is placed on the ceramic flame-sprayed film 2, and the sample 9 is attracted and held by applying a voltage.</p> |
