| 摘要 |
PURPOSE:To produce the optical switch of small light transmission loss by lessening the light transmission loss of optical waveguides so that the light transmission loss of the optical switch can be lessened and the optical waveguides of the small light transmission loss can be formed. CONSTITUTION:This optical switch 21 is constituted by bringing a part of the plural optical waveguides 22, 23 consisting of a semiconductor material the proximity of each other to form a coupling part 24. The light transmission loss of the optical waveguides 22, 23 is smaller than the light transmission loss of the plural optical waveguides constituting this coupling part 24. The one optical waveguide 22a of the coupling part 24 may be formed to have the light transmission loss smaller than the light transmission loss of the other optical waveguide 25. This process for production consists of removing the parts, exclusive of the part to be formed as the coupling part, of a first semiconductor layer, forming a second semiconductor layer of the light transmission loss smaller than the light transmission loss of the first semiconductor layer around the first semiconductor layer and selectively removing these semiconductor layers, thereby forming the plural optical waveguides and the coupling part. |
