发明名称 TOOL HOLDING MECHANISM
摘要 PURPOSE:To obtain a tool holding mechanism wherein adjustment is unnecessary, manufacture is easy, and irregularity of bonding quality can be prevented, when the bonding tool is exchanged. CONSTITUTION:An upper frame 2 is fixed on the front upper part of a base 5, and a load transmission rod 1 is engaged with an engaging part 2a protruding from the upper surface of the upper frame 2. A ring type protruding part 2b is formed on the lower surface of the upper frame 2. A lower frame 3 is formed on the lower side of the upper frame 2. A packing 4 of soft copper is mounted on the upper surface of the lower frame 3. The protruding part 2b is made to abut against the upper surface of the packing 4. A bonding tool 6 is held by a shaft part vertically installed on the lower surface of the lower frame 3.
申请公布号 JPH06232197(A) 申请公布日期 1994.08.19
申请号 JP19930017434 申请日期 1993.02.04
申请人 TOSHIBA CORP 发明人 OYABU MAKOTO;OTA MAKOTO;SHINTANI MASATO;SUZUKI EIICHI;MIHASHI TATSURO
分类号 H01L21/60 主分类号 H01L21/60
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