| 摘要 |
PURPOSE:To prevent the occurrence of a relative positional deviation between a table and substrate even when the substrate shakes when the table is driven by applying the same acceleration as that applied to the substrate on the table so as to correct the relative positional deviation between the substrate and table caused by the shaking of the substrate when the table is driven. CONSTITUTION:Upon receiving the X-direction acceleration information of a Y-table 1Y measured by means of an accelerometer 9X, a controller 10 applies in real time the same acceleration as the measured X-direction acceleration of the table 1Y to a table 1X through linear motor mechanisms 5X and 6X. As a result, no relative positional deviation occurs between the tables 1X and 1Y even when the table 1X shakes during movement. Therefore, the table 1X looks as if the table is driven through a motor 4X and feed screw 3X and stopped at an aimed position. Therefore, a substrate can be exposed without waiting until the vibrations of a device abate. |
