发明名称 IMAGE RECOGNITION AND ALIGNMENT DEVICE
摘要 PURPOSE:To set a dictionary area capable of providing high alignment accuracy to an image processing part which can be memory-set by memory-setting an arbitrary pattern on a board surface where these exists no dummy pattern around there as a reference pattern for board alignment. CONSTITUTION:An arbitrary pattern is stored as a temporary dictionary area W1 and the arbitrary pattern and nearby patterns are read, thereby determining a matching rate with the temporary dictionary area W1. A value, which is close to +1, is adopted as the matching rate of the arbitrary pattern. On the other hand, the matching rate of the nearby patterns is lowered than that of the arbitrary pattern. When the difference is small, however, the arbitrary pattern resembles the nearby patterns. When the difference is large, there exists no resemblance between them. Therefore, if only a pattern whose matching rate is large, is avaliable near the arbitrary pattern, the arbitrary pattern is set as a reference pattern or more specifically the pattern is memory-set as a regular dictionary area and used for alignment.
申请公布号 JPH06232240(A) 申请公布日期 1994.08.19
申请号 JP19930015251 申请日期 1993.02.02
申请人 HITACHI TECHNO ENG CO LTD 发明人 KINUMEGAWA ISAO;TAKAGAKI TADASHI
分类号 B65H9/00;B65H43/08;G06T1/00;G06T7/00;H01L21/027;H01L21/30;H01L21/68 主分类号 B65H9/00
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