| 摘要 |
PURPOSE:To realize the measurement of microdimensions designated at the time of registration without requiring the alignment of measuring part on an image using a mechanical coordinate teaching means by performing registration previously. CONSTITUTION:A characteristic partial image is extracted, as a feature model, from a measured image of an object subjected to microline width measurement. A measuring window is installed at a line width position to be measured with reference to specific coordinates of the partial image and an offset amount from the reference is determined as measuring window offset coordinates. Furthermore, parameters for line width measurement are determined and these three data are previously registered as one data set. In the measurement of an object same as a registered one, a measured image most analogous to the feature model is partially detected. With reference to the specific coordinates thereof, the measuring window is installed at a position shifted by the amount corresponding to the measurement offset coordinates and then measurement is carried out according to the measurement parameters. |
