| 摘要 |
PURPOSE:To increase incident light, reduce series resistance and improve durabil ity for a photoelectric conversion layer of a flexible thin film photoelectric conversion element using a plastic film as a substrate. CONSTITUTION:By covering the surface at the incident side of light of a substrate with SiN film 5 or SiOX film, the reflectivity of light decreases and a conversion efficiency rises compared to the case where the plastic is exposed on the surface, and also the deterioration of a film due to ultraviolet rays can be prevented by the absorption of ultraviolet rays. Moreover, ingress of moisture can be restricted. Also by intervening a SiN film 5 or SiOX between the substrate and the transparent electrode 2, the impurities spreading from the plastic to the transparent electrode 2 can be blocked, and the rise in sheet resistance of the transparent electrode 2 due to the impurities can be restricted. |
