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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH06232079(A)
申请公布日期
1994.08.19
申请号
JP19930013830
申请日期
1993.01.29
申请人
SONY CORP
发明人
KUBOTA SHINJI
分类号
C23C16/50;C23C16/507;C23C16/511;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/302
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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