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发明名称
MEASURING METHOD FOR CHARACTERISTIC OF SEMICONDUCTOR ELEMENT USING PROBE CARD
摘要
申请公布号
JPH06230031(A)
申请公布日期
1994.08.19
申请号
JP19930016394
申请日期
1993.02.03
申请人
SANYO ELECTRIC CO LTD
发明人
TANAKA NOBUYUKI
分类号
G01R1/073;G01R31/26;G01R31/28;G01R31/319;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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