发明名称 Transport system and method for objects to be aligned with one another
摘要 A transport system and method for objects to be aligned with one another is made available. The transport system has a robot part and an alignment part which are arranged in a mutually shock-insulated and vibration-insulated manner. The advantages of the invention lie in very high alignment accuracy and an increased transport rate of the objects.
申请公布号 DE4304301(A1) 申请公布日期 1994.08.18
申请号 DE19934304301 申请日期 1993.02.12
申请人 KARL SUESS KG PRAEZISIONSGERAETE FUER WISSENSCHAFT UND INDUSTRIE - GMBH & CO, 85748 GARCHING, DE 发明人 BUTTINGER, RICHARD, 8300 LANDSHUT, DE;SUESS, WINFRIED, DR., 8000 MUENCHEN, DE;RAUCH, FRANZ, 8000 MUENCHEN, DE;ZIEGLTRUM, LORENZ, 8050 FREISING, DE
分类号 B65G49/07;G03F7/20;H01L21/677;H01L21/683;(IPC1-7):B65G49/07;B65G47/91;H01L21/68;G03F9/00 主分类号 B65G49/07
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