| 摘要 |
An apparatus for heat treatment, which prevents metallic contamination of the object of heat treatment due to a metallic manifold, and which reliably maintains a hermetic separation state between a moving mechanism storage chamber and a reaction chamber even when the pressure inside the former is remarkably lower than the pressure inside the latter. An exhaust port (7) is disposed in the quartz reaction chamber (1) so as to evacuate the inside of this chamber (1), and a sealing flange of a double structure is formed of a quartz flange (9) and a metallic flange (10). When the reaction chamber is under a sealed state, the metallic flange (1) is not exposed to the reaction chamber (1). Further, the sealing flange and a moving body (12) are engaged with each other by springs (3). When the sealing flange (10) is placed in the sealing position, the springs energized by the moving body press the sealing flange against the internal pressure of the reaction chamber. |
